ADL [ADL]Prof. Yoon-Uk Heo: Comparative study on the specimen thickness measurement using EELS and CBED …
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댓글 0건 조회 552회 작성일 2021-12-01 17:41
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Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam
electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to
satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning
transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio
method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the 131 diffracted disk of
austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in
the thickness range of 72 ~ 113 nm with a difference of less than 5%.
Keywords: Thickness measurement, EELS, CBED, TEM, Carbon contamination method
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